Facilities
Department of Physics and Astronomy
Low
temperature facilities in the mesoscopic group include an Oxford Kelvinox 25
dilution refrigerator with the base temperature 25 mK, equipped with
8T-superconducting solenoid, a 3He insert (the base temperature
0.3K) which fits a wide-mouth transport LHe dewar, and an Oxford variable
temperature 4He flow cryostat with 8T superconducting solenoid.
Nanofabrication facilities in the mesosopic group include a class 100 cleanroom, an electron-beam lithography system based on the thermal-field-emitter SEM Sirion (FEI Company) equipped with an e-beam writing attachment (J C Nabity Lithography Systems), and three thin-film deposition systems for magnetron sputtering, thermal evaporation, and electron-gun deposition of thin films of metals and dielectrics. Other equipment available includes a reactive ion etcher, an atomic force microscope, and equipment required for wafer and sample processing.
Kelvinox 25 Dilution Refrigerator with Oxford Instr. Cryomagnetic System
base temperature 25 mK, B=0-8T (T = 2-300K, B = 0-8T)
Nanolithography (FEI Sirion SEM +
J C Nabity Lithography System)
Thin-film deposition systems
(magnetron sputtering, thermal evaporation, and e-gun deposition)