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GERSHENSON LAB

MESOSCOPIC PHYSICS and QUANTUM COMPUTING

 

 

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Low Temperature and Measurement Facilities

BlueFors Cryogen-Free Dilution Refrigerator

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Oxford Kelvinox 25 Dilution Refrigerator

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Nanofabrication Facilities

            

Thermal-field emitter SEM (FEI Sirion) equipped with JC Nabity writing attachment.

 

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Thin-film deposition systems (magnetron sputtering, thermal evaporation and e-gun deposition)

 

 

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Photomask alignment system (Karl Suss, MJB3)

Reactive Ion Etching system (Torr Inc., RIE300W-3MFC)

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Wafer scriber (Karl Suss, HR-50)

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Wire bonding machine (West Bond, 7476D-79)

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Wet chemical bench (2M Airtechnology)

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Scanning probe microscope (Pacific Nanotechnologies, Nano-R SPM)

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Optical microscope (Leitz Wetzler, Labor Lux S)

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Water purification system (Barnstead, E-Pure)