GERSHENSON
LAB
MESOSCOPIC
PHYSICS and QUANTUM COMPUTING
|
|
|||
|
|
|
|||
|
|
||||
Low
Temperature and Measurement Facilities
|
||||
|
BlueFors Cryogen-Free Dilution Refrigerator
|
Oxford
Kelvinox 25 Dilution Refrigerator |
|||
|
Nanofabrication Facilities |
||||
|
Thermal-field emitter SEM (FEI Sirion) equipped with JC Nabity
writing attachment.
|
||||
|
Thin-film deposition systems (magnetron
sputtering, thermal evaporation and e-gun deposition)
|
||||
|
|
|
|||
|
Photomask alignment system
(Karl Suss, MJB3) |
Reactive Ion Etching system (Torr Inc., RIE300W-3MFC) |
|||
|
Wafer scriber (Karl Suss,
HR-50) |
Wire bonding machine (West Bond, 7476D-79) |
|||
|
Wet chemical bench (2M Airtechnology) |
Scanning probe microscope (Pacific Nanotechnologies,
Nano-R SPM) |
|||
|
Optical microscope (Leitz
Wetzler, Labor Lux S) |
Water purification system (Barnstead,
E-Pure) |
|||