GERSHENSON
LAB
MESOSCOPIC
PHYSICS and QUANTUM COMPUTING
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Low
Temperature and Measurement Facilities
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BlueFors Cryogen-Free Dilution Refrigerator . |
Oxford
Kelvinox 25 Dilution Refrigerator
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Nanofabrication Facilities |
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. Thermal-field emitter SEM (FEI Sirion) equipped with JC Nabity
writing attachment.
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Thin-film deposition systems (magnetron
sputtering, thermal evaporation and e-gun deposition)
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Photomask alignment system (Karl Suss, MJB3) |
Reactive Ion Etching system (Torr Inc., RIE300W-3MFC) |
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Wafer scriber (Karl Suss,
HR-50) |
Wire bonding machine (West Bond, 7476D-79) |
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Wet chemical bench (2M Airtechnology) |
Scanning probe microscope (Pacific Nanotechnologies,
Nano-R SPM) |
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Optical microscope (Leitz
Wetzler, Labor Lux S) |
Water purification system (Barnstead,
E-Pure) |