Copyright 2005, American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

The following article appeared in Appl. Phys. Lett. 86, 152902 (2005) and may also be found at http://link.aip.org/link/?APL/86/152902 .

S. Sayan, N.V. Nguyen, J. Ehrstein, T. Emge, E. Garfunkel, M. Croft, Xinyuan Zhao, David Vanderbilt, I. Levin, E.P. Gusev, Hyoungsub Kim, and P.J. McIntyre, Structural, electronic and dielectric properties of ultrathin zirconia films on silicon (in PDF format).

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