Vladimir Aksyuk., Lucent Bell Laboratories, NJ
 

Silicon micromechanics is an emerging field that is beginning to impact many areas of science and technology. I will give an introduction to Micro Electro-Mechanical Systems (MEMS) and an overview based on the current Bell Labs research effort. Design, fabrication and applications of Si micromachines will be discussed. Examples include high sensitivity magnetometers, micro-mechanical sensors for Casimir force detection, optical switches, beam-steering micromirrors and variable optical attenuators for applications in lightwave telecommunication networks.