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The manipulator controls for the PMT can be seen at the left. PMTs are sensitive to the angle of incidence of the radiation and to image location across the PMT. The manipulator allows a mapping of the PMT orientation and position to find the most stable PMT performance. The PMT can then be flipped in and out of the beam, maintaining this best performance orientation. The port facing the front of the chamber is the location where the NIST standard photodiode and subsequently the detector to be evaluated are attached. The orientation of the beam can be adjusted using the associated micrometers. The chamber can seal to a faceplate or attach to a housing holding the detector. |
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This Extreme Ultraviolet DQE chamber consists of a McPherson 247 grazing incident monochromator for operation over 5 to 120 nm. The light source at the left is a hollow cathode lamp shown with Ar gas source attached. The system operates in a windowless mode with gas from the lamp having to be preferentially pumped by a diffusion pump under the table. The detector or the NIST standard sensor are attached at the right and wavelengths are selected by moving the detector along the Rowland circle track. |
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Some solid-state devices are tested while still in their wafer (or fragment of a wafer) package. These devices generally represent state-of-the-art, but immature technologies. Electrical contacts are made with small vacuum micropositioners with with very small needle contacts. These contacts can be positioned under a microscope to an accuracy of about half the width of a typical human hair. Onced mounted, the chip can be exposed to VUV (vacuum ultraviolet) light. The entire assembly is on a vacuum manipulator that holds the chip to be tested as well as a NIST calibrated standard. The experimenter can flip between the standard and the unknown without breaking vacuum or without the introduction of a reflecting surface. Pictured on the left is the exterior of the chamber. On the right is the internal components of the chamber which remain attached to the top surface along with the electrical feedthroughs. The inset shows an AlGaN test device inside the light entrance port. |
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This chamber contains small pinholes and a high-quality magnesium-floride lens, configured to de-magnify the pinhole image by a factor of 4. Working at wavelengths of 120 nm, the chamber can place a 10 micron wide spot on a single pixel of a typical UV detector and then move that spot vertically or horizontally in 2 micron steps. A monochromator is attached to the narrow tube side to limit wavelength band pass, while the detector is attached to flat surface with an O-ring (not visible). The micometers adjust the tilt and minor focussing. Operation at wavelengths as longward as 200 nm are possible with various vacuum-tight spacers. This chamber test the resolution of the detector as well as the level of linear independence between two detector pixels. |
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An Oriel monochromator and matched light sources (left outside of the box) are used to send a selected wavelength (color) of light into a light tight box housing a detector and power supply. Observations are to compare the signal levels from a calibrated detector against the signal levels from the detector of interest. Test results are good to one part in 100 million under ideal conditions. detectors. |
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Electro-Static Discharge Station Pictured left to right are 1) a laminar flow workbench, 2) environmentally controlled storage containers, 3) an Electro-Static Discharge (ESD) station, and 4 a probe station with 100x microscope to test devices not yet packaged. All the storage areas have UV blocking windows. Two have slow nitrogen purges to maintain low relative humidity and the large stainless steel container is also ohmically grounded. Devices can be removed from it and moved to the ESD station while the investigator remains grounded. The station is equipped with an ohmically grounded mat and a neutralizing blower. A filtered ESD air gun is used to remove small particulates if necessary. Once a device has been prepared for testing, the researcher can use foot straps and the ohmically ground mats (not shown) to transport the detector safely to the test station. |
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